In the 1980s, when IBM's Gerd Binnig heard that the tip of the world's first scanning tunneling microscope (STM) was towed on the surface of the atom, causing "fascinating noise," these were able to observe a very small-scale microscopic world. The tools have become the cornerstone of nanotechnology research and development. Subsequently, on a similar working principle, scientists have developed an atomic force microscope (AFM). This technology has evolved over the years, and IBM even wants to use it as the foundation technology for a company's memory development project. Despite their hard work, the AFM is still huge and costly, getting around $50,000. Researchers at the University of Texas (UT) in Dallas are now improving the technical performance of AFM by using microelectromechanical (MEMS) technology. Their results show that after using the new technology, the volume of the entire AFM can be reduced to about 1 square centimeter. In the academic journal IEEE MEMS, scientists describe specific application methods. They connected MEMS-based AFM to boards containing miniaturized components such as circuits, sensors and control devices. By relying on advanced manufacturing processes, the volume of the entire AFM can be greatly reduced. Although the cost reduction (because of shrinking size and economies of scale of MEMS devices) is the biggest feature of the new generation of AFM, in fact, the AFM measurement method is the real innovation of this technology. Typically, the AFM's complete set of equipment includes a cantilevered probe that passes over the surface of the sample as it is recorded and scanned, as long as the probe is perpendicular to the sample required to maintain the same atomic force. Because the atoms create mutually exclusive forces that keep the repulsive force constant, the outline of the sample can be sketched to map the surface features of the material. Scientists from the University of Dallas have developed a new set of devices that no longer rely on constant forces or distances. The tip of the new device vibrates up and down perpendicular to the sample and quickly lifts off after contact with the sample. In AFM technology, this mode is called "Tapping Mode". This technology is in stark contrast to the widely used contact mode AFM. Researchers at the University of Dallas have developed a novel approach to tapping patterns in AFM: by using a single piezoelectric transducer for both driving and sensing, eliminating the need for optical sensors. Since the amplitude after contact changes with the position of the structure interacting with the sample, a new atomic force microscope can generate an image of the sample by recording the amplitude of the oscillation. “Performing measurements in tapping mode reduces the force applied to the sample, which is important for scanning fragile samples (such as biological samples),†said Reza Moheimani, a professor of mechanical engineering at Dallas and co-author of the study. Said in an interview with IEEE Overview. "We believe that the final version of the system will use a similar approach to use a compact motorized device to bring the MEMS chip into contact with the sample. Currently limited by the imaging technology of current AFM devices, the device is not capable of imaging in a liquid environment. However, it is no longer necessary to test the sample in a vacuum environment. In the future, new MEMS-AFM devices may consider designing functions that can be imaged in liquids," Moheimani added. The MEMS-AFM prototype is manufactured using a simple MEMS process in which all mechanical scanning and sensing components are contained in a tiny chip. Moheimani said: "Researchers have major challenges in designing devices to meet manufacturing process requirements while achieving the required characteristics in terms of mechanical bandwidth, displacement range and cross-coupling." Researchers at the University of Dallas must adopt an iterative design process in which testing and characterization of early manufacturing versions of the device allows them to better utilize the manufacturing process and significantly improve the performance of areas such as cross-coupling reduction and reliability. routing. Moheimani and his colleagues have already had their own views on the next engineering challenge of MEMS-AFM. For example, a sharp probe at the end of the cantilever of the MEMS-AFM is fabricated in a post-processing step using electron beam deposition. Researchers are working to integrate probe manufacturing into the MEMS manufacturing process. This will simplify the manufacture of the device and increase durability. In addition, researchers are looking to miniaturize support electronics and control systems. They are trying to combine an ASIC chip interface's application specific integrated circuit (ASIC) with prototype hardware. This will make it possible to connect to the end user's PC via a single USB connection. Finally, Moheimani added: "Our ultimate goal is to develop a system that can perform video rate AFM imaging using a single MEMS chip. The current device successfully demonstrates many of the features required, and future iterative products of the device will be designed to A further effort is being made to achieve this goal. Such a device will enable people to perform high-speed AFM imaging using a portable and low-cost system."
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